VB-6 a laser-induced ohmic link for wafer-scale integration in standard CMOS processing
- 1 November 1986
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 33 (11) , 1861
- https://doi.org/10.1109/t-ed.1986.22818
Abstract
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