KOH etching of high-index crystal planes in silicon
- 1 March 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 31 (1-3) , 283-287
- https://doi.org/10.1016/0924-4247(92)80117-l
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation LayersJournal of the Electrochemical Society, 1990