Electrical Characterization of the AlN/Si(111) System

• 1 February 1998
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 264-268, 1389-1392
• https://doi.org/10.4028/www.scientific.net/msf.264-268.1389

Abstract

Keywords

• INTERFACE STATES (OR TRAPS)
• METAL INSULATOR SEMICONDUCTOR STRUCTURES
• MOLECULAR BEAM EPITAXY (MBE)
• POOLE-FRENKEL EMISSION
• SCANNING ELECTRON MICROSCOPE (SEM)