Fabrication of large area silicon solar cells by rapid thermal processing

• 16 October 1995
• journal article
• Published by AIP Publishing in Applied Physics Letters
• Vol. 67  (16) , 2335-2337
• https://doi.org/10.1063/1.114336

Abstract

Keywords

• HEAT TREATMENT
• PHOSPHORUS
• THERMAL DIFFUSION
• SURFACE AREA
• SILICON WAFER
• RAPID THERMAL PROCESSING