Simultaneous Measurement of Channeling Effects on the Sputtering and Backscattering Processes
- 10 December 1969
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 188 (2) , 654-656
- https://doi.org/10.1103/PhysRev.188.654
Abstract
Sputtering and backscattering yields have been simultaneously measured for beams of H, He, and N incident on a single Au crystal near the axes. The angular half-width of the yield minima produced by crystal rotation were measured and compared with the low-energy critical-angle predictions of Lindhard. Dechanneling effects were observed to play a major role in determining the magnitude and energy dependence of the observed minima.
Keywords
This publication has 3 references indexed in Scilit:
- Directional effects of sputtering of a single gold crystal under bombardment by heavy ionsCanadian Journal of Physics, 1969
- Critical angles for channeling of low energy ions in tungstenCanadian Journal of Physics, 1968
- Single-crystal sputtering including the channeling phenomenonCanadian Journal of Physics, 1968