High-rate deposition of photosensitive a-SiC:H using a carbon source of C2H2
- 1 December 1987
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 97-98, 1447-1450
- https://doi.org/10.1016/0022-3093(87)90347-4
Abstract
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