Particle deposition on wafers: A comparison between two modeling approaches
- 31 December 1988
- journal article
- Published by Elsevier in Journal of Aerosol Science
- Vol. 19 (7) , 1409-1412
- https://doi.org/10.1016/0021-8502(88)90186-3
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A Perturbation Model for the Computation of Collection Efficiency for Axially Symmetric CollectorsAerosol Science and Technology, 1984
- Exact Similar Solutions of the Laminar Boundary-Layer EquationsPublished by Elsevier ,1967
- A Method of Obtaining An Approximate Solution of the Laminar Boundary-Layer EquationsJournal of the Aerospace Sciences, 1961