AES investigation of the chemical structure of silicon oxy-nitride films

• 1 March 1979
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 16  (2) , 618-621
• https://doi.org/10.1116/1.570013

Abstract

Keywords

• AES INVESTIGATION
• SILICON OXY
• NITRIDE FILMS
• CHEMICAL STRUCTURE
• STRUCTURE OF SILICON