Observation of Etching of n-Type Silicon in Aqueous HF Solutions

• 1 January 1967
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 114  (4) , 414
• https://doi.org/10.1149/1.2426612

Abstract

Keywords

• HF SOLUTIONS
• AQUEOUS HF
• TYPE SILICON
• OBSERVATION OF ETCHING