Q-Optimized Lateral Free-Free Beam Micromechanical Resonators
- 1 January 2001
- book chapter
- Published by Springer Nature
- p. 1082-1085
- https://doi.org/10.1007/978-3-642-59497-7_256
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- VHF free-free beam high-Q micromechanical resonatorsJournal of Microelectromechanical Systems, 2000
- High-Q HF microelectromechanical filtersIEEE Journal of Solid-State Circuits, 2000
- Stabilité et mécanique non linéaireRevue Française de Génie Civil, 2000