Fabrication of Planar Microlens by Transverse Electromigration Method
- 1 December 1986
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 25 (12R) , 1959
- https://doi.org/10.1143/jjap.25.1959
Abstract
The fabrication of planar microlens by a transverse electromigration method has been proposed and demonstrated. The possibility of improving productivity has been obtained, while the optical properties of the resultant lens are almost equivalent to those observed by a conventional method. The N.A. and the focused spot diameter were 0.27 and 5.9 µm, respectively.Keywords
This publication has 4 references indexed in Scilit:
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- Distributed-index planar microlensApplied Optics, 1982
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