Progress in wafer charging and charge neutralization
- 1 April 1993
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 74 (1-2) , 287-290
- https://doi.org/10.1016/0168-583x(93)95062-a
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Ion beam system design for ULSI device requirementsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
- Review on kinetic ion-electron emission from solid metallic targetsNuclear Instruments and Methods in Physics Research, 1982
- Beam transportRadiation Effects, 1979
- Theoretical and experimental study of space charge in intense ion beamsPhysical Review A, 1979