Optical activation of a silicon vibrating sensor

• 9 October 1986
• journal article
• Published by Institution of Engineering and Technology (IET) in Electronics Letters
• Vol. 22  (21) , 1097-1099
• https://doi.org/10.1049/el:19860752

Abstract

Keywords

• OPTICAL INTERROGATION
• MODES
• VIBRATING SENSOR
• OPTICAL EXCITATION
• RESONANCE