Charakterisierung ultrareiner Materialien für die Mikroelektronik mit aktivierungsanalytischen Methoden
- 1 May 1991
- journal article
- blickpunkt analytik
- Published by Wiley in Nachrichten aus Chemie, Technik und Laboratorium
- Vol. 39 (5) , 536-543
- https://doi.org/10.1002/nadc.19910390509
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Determination of uranium, thorium, and 18 other elements in high-purity molybdenum by radiochemical neutron activation analysisAnalytical Chemistry, 1990
- Determination of trace impurities in electronic grade quartz: Comparison of inductively coupled plasma mass spectroscopy with other analytical techniquesMicrochimica Acta, 1989
- Multielement radiochemical neutron activation analysis of high purity aluminiumAnalytical and Bioanalytical Chemistry, 1988
- Neutron activation analysis of aluminium with radiochemical separation of 24NaAnalytical and Bioanalytical Chemistry, 1986
- Characterization of Silicon Materials for VLSIPublished by Elsevier ,1983
- Entwicklungsstand und Bedeutung der AktivierungsanalyseAngewandte Chemie, 1979