Acoustic Microscropy As A Diagnostic Tool For CVD Diamond Films
- 15 January 1990
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- p. 95-103
- https://doi.org/10.1117/12.962066
Abstract
Using acoustic microscopy, we have examined polycrystalline diamond films grown by the CVD process on silicon substrates. This technique enables nondestructive characterization of these films with regard to their grain size, stress patterns and boundary anomalies between the film and the substrate. We have used a scanning acoustic microscope (SAM) to characterize several diamond films grown on silicon substrates at Crystallume and at ASTEX Co. The film thicknesses ranged from 1 μm to 100 μm with nominal grain sizes from 0.3 to 8 μm. Results will be presented showing various microstructural features in the films.Keywords
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