Orientation dependence of built-in surface charge on thermally oxidized Silicon
- 1 January 1965
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Proceedings of the IEEE
- Vol. 53 (12) , 2133-2134
- https://doi.org/10.1109/proc.1965.4513
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- The Oxidation of Silicon in Dry Oxygen, Wet Oxygen, and SteamJournal of the Electrochemical Society, 1963
- The mechanisms for silicon oxidation in steam and oxygenJournal of Physics and Chemistry of Solids, 1960