High-k gate dielectrics with ultra-low leakage current based on praseodymium oxide

Publisher Website

11 November 2002

proceedings article
Published by Institute of Electrical and Electronics Engineers (IEEE)

https://doi.org/10.1109/iedm.2000.904404

Abstract

No abstract available

This publication has 2 references indexed in Scilit:

Praseodymium 3d- and 4d-core photoemission spectra of $\Pr_{2}$ $O_{3}$
Physical Review B, 1991
XPES studies of oxides of second- and third-row transition metals including rare earths
Journal of Electron Spectroscopy and Related Phenomena, 1980