Range profiles of xenon in PVA
- 1 June 1990
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 47 (4) , 351-354
- https://doi.org/10.1016/0168-583x(90)90611-w
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Non-regular depth profiles of light ions implanted into organic polymer filmsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
- Range measurements and thermal stability study of AZ111 photoresist implanted with Bi ionsJournal of Applied Physics, 1988
- Density enhancement in ion implanted polymersNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Distributions of light ions and foil destruction after irradiation of organic polymersJournal of Applied Physics, 1985
- High energy ion beam modification of polymer filmsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Ion bombardment of resistsNuclear Instruments and Methods in Physics Research, 1983
- Ion beam exposure characteristics of resists: Experimental resultsJournal of Applied Physics, 1982
- New projected range algorithm as derived from transport equationsThe European Physical Journal A, 1982
- Calculation of projected ranges — analytical solutions and a simple general algorithmNuclear Instruments and Methods, 1981
- A Monte Carlo computer program for the transport of energetic ions in amorphous targetsNuclear Instruments and Methods, 1980