Emission characteristics of ZrN thin film field emitter array fabricated by ion beam assisted deposition technique
- 1 March 1998
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 16 (2) , 829-832
- https://doi.org/10.1116/1.589916
Abstract
No abstract availableKeywords
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