Picosecond Laser Damage Mechanisms At Semiconductor Surfaces
- 23 April 1982
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 0322, 93-99
- https://doi.org/10.1117/12.933214
Abstract
We treat picosecond laser induced damage as a non-equilibrium phase transition and propose a new damage mechanism. This model which includes energy transfer by resonant surface plasmons on small electron density droplets is shown to be consistent with existing experimental data. New experimental data has been taken which demonstrates the nucleation and growth aspects of the laser damage process.Keywords
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