LASER PROCESSING OF HIGH TEMPERATURE SUPERCONDUCTING THIN FILMS
- 1 January 1990
- journal article
- research article
- Published by Taylor & Francis in Materials and Manufacturing Processes
- Vol. 5 (4) , 529-548
- https://doi.org/10.1080/10426919008953276
Abstract
High quality thin films of high temperature superconductors (HTS) have been fabricated using pulsed or cw lasers as physical vapor deposition sources. There is current interest in scaling the pulsed laser deposition (PLD) technique to coat 3-in. wafers with HTS. Process control and diagnostics relevant to achieving the required scaling and reproducibility will be reviewed.Keywords
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