Study of aging effects in a chemical amplification resist: SAL601-ER7

• 1 November 1989
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 7  (6) , 1740-1744
• https://doi.org/10.1116/1.584449

Abstract

Keywords

• AMPLIFICATION RESIST
• SAL601 ER7
• CHEMICAL AMPLIFICATION
• AGING EFFECTS