Optimization And Reliability Of Epitaxial Lift-off For OEIC Fabrication

Publisher Website

24 August 2005

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

p. B77-B78
https://doi.org/10.1109/leosst.1992.697473

Abstract

No abstract available

Keywords

This publication has 1 reference indexed in Scilit:

Extreme selectivity in the lift-off of epitaxial GaAs films
Applied Physics Letters, 1987