Diagnostic test for ion implantation dosimetry
- 1 May 1979
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 16 (3) , 882-883
- https://doi.org/10.1116/1.570106
Abstract
A diagnostic technique is discussed and illustrated by experiment, which reveals sources of error in current integration dosimetry. The technique uses simple, specially prepared samples and an oscilloscope display of the measured current versus time.Keywords
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