Study of residual damage in Si(001) due to low energy (110 eV) Ar+ and Cl+ bombardment using medium energy ion scattering
- 2 June 1991
- journal article
- Published by Elsevier in Surface Science
- Vol. 249 (1-3) , 293-312
- https://doi.org/10.1016/0039-6028(91)90854-l
Abstract
No abstract availableThis publication has 25 references indexed in Scilit:
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