In situ preparation of lithographic resists containing glutarimide groups

• 1 December 1978
• journal article
• research article
• Published by Wiley in Journal of Applied Polymer Science
• Vol. 22  (12) , 3397-3403
• https://doi.org/10.1002/app.1978.070221205

Abstract

Keywords

• CYCLIC
• FILMS
• ISOCYANIC
• SITU
• METHACRYLIC
• SOLUBILITY
• LITHOGRAPHIC
• CONTAINING
• COPOLYMERS