Fabrication of double-gated Si field emitter arrays for focused electron beam generation

• 1 September 1995
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 13  (5) , 1968-1972
• https://doi.org/10.1116/1.588116

Abstract

Keywords

• FIELD EMISSION
• ELECTRON BEAM