Impurities in Bulk A-Si:H, Silicon Nitride, and at the a-Si:H/Silicon Nitride Interface
- 1 January 1984
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Amorphous Si prepared in a UHV plasma deposition systemJournal of Non-Crystalline Solids, 1983
- Amorphous Semiconductor SuperlatticesPhysical Review Letters, 1983
- Impurity effects in a-Si:H solar cells due to air, oxygen, nitrogen, phosphine, or monochlorosilane in the plasmaJournal of Applied Physics, 1981