Gettering in Silicon by Oxygen Related Defects, Stacking Faults and Thin Polycrystalline Films
- 1 January 1989
- journal article
- Published by Trans Tech Publications, Ltd. in Solid State Phenomena
- Vol. 6-7, 13-20
- https://doi.org/10.4028/www.scientific.net/ssp.6-7.13
Abstract
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