Correlation of 150 mm P/P+ Epitaxial Silicon Wafer Flatness Parameters for Deep Submicron Applications
- 1 January 1993
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 140 (1) , 229-241
- https://doi.org/10.1149/1.2056094
Abstract
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