Low yield sputtering of monocrystalline metals
- 1 March 1980
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 170 (1-3) , 341-346
- https://doi.org/10.1016/0029-554x(80)91037-x
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Surface Ejection in Single Crystal SputteringCanadian Journal of Physics, 1975
- Computer simulation of the penetration and backscattering of low energy krypton ions into single crystal tungstenRadiation Effects, 1972
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969
- Energy Distribution of Sputtered Cu AtomsJournal of Applied Physics, 1964