Transverse thermal velocity broadening of focused beams from liquid metal ion sources
- 1 November 1988
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 6 (6) , 2090-2094
- https://doi.org/10.1116/1.584117
Abstract
Experiments have shown that the target current density in focused ion beam columns have long ‘‘tails’’ outside the central submicron region. We show that these tails result from a transverse velocity distribution which has a Holtsmark probability density. Both theory and experiment show that the tails are reduced as the system magnification and source current are reduced.Keywords
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