The chemical vapour deposition and characterization of ZrO2 films from organometallic compounds
- 1 December 1977
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 47 (2) , 109-120
- https://doi.org/10.1016/0040-6090(77)90350-9
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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