Spectroscopic density determination of nitrogen species in an ECR discharge

14 June 1994

journal article
Published by IOP Publishing in Journal of Physics D: Applied Physics

Vol. 27 (6) , 1207-1213
https://doi.org/10.1088/0022-3727/27/6/018

Abstract

Absolute line intensities of NI up to NV in the VUV region have been measured in an electron cyclotron resonance discharge running in nitrogen and helium-nitrogen mixtures. Using first-order approximation formulae the densities of NI up to NV were determined. For special NII and NIII lines the influence of excitation by inner-shell ionization on density determinations is discussed.

Keywords

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