Characterization of CoO-Doped SiO2 Nanocomposite Films and Their Optical Transmittance Change by Nitrogen Oxide

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Abstract
We developed CoO-doped nanocomposite films which change their optical transmittance by nitrogen oxide using co-sputtering method. Films sputtered from SiO2 target with CoO pellets on at 100W under 0.27 Pa Ar atmosphere showed reversible transmittance change by NO at 350°C in the wavelength range from 400 to 800 nm. Cobalt oxide dots 4-8 nm in diameter were observed in the CoO/SiO2 nanocomposite films by TEM observation. The heat-treated CoO/SiO2 film at 600°C which showed no transmittance change by NO still had cobalt oxide nanoparticles embedded in SiO2 matrix. The sensing properties is considered to be originated from nanostructure composed of functional nanoparticles which change their optical transmittance, nanopores which give paths of gas molecules and transparent matrix,

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