Pyrometric interferometry for real time molecular beam epitaxy process monitoring

• 1 March 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (2) , 1207-1210
• https://doi.org/10.1116/1.587045

Abstract

Keywords

• REAL TIME
• MOLECULAR BEAM EPITAXY