The effect of surface recoils on the energy distribution of sputtered gold
- 1 February 1976
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 132, 317-319
- https://doi.org/10.1016/0029-554x(76)90752-7
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- The behaviour of surfaces under ion bombardmentReports on Progress in Physics, 1975
- The energy distribution of sputtered atoms from goldRadiation Effects, 1972
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969
- II. The energy spectrum of ejected atoms during the high energy sputtering of goldPhilosophical Magazine, 1968
- I. A mechanical spectrometer for analysing the energy distribution of sputtered atoms of copper or goldPhilosophical Magazine, 1968
- On the Mechanism of SputteringPhysica Status Solidi (b), 1966