X-RAY PHOTOELECTRON SPECTROSCOPY OF SiO2-Si INTER-FACIAL REGIONS
- 1 January 1978
- book chapter
- Published by Elsevier
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Silicon Monoxide Thin FilmsJournal of the Electrochemical Society, 1976
- Electron mean escape depths from x−ray photoelectron spectra of thermally oxidized silicon dioxide films on siliconJournal of Vacuum Science and Technology, 1975