Epitaxial Growth of GaAs with ( C 2 H 5 ) 2GaCl and AsH3 in a Hotwall Reactor

• 1 September 1991
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 138  (9) , 2789-2794
• https://doi.org/10.1149/1.2086057

Abstract