Impedance matching in radio-frequency discharge excited waveguide lasers

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Abstract
The problem of matching the impedance of a radio-frequency power generator to a gas laser discharge tube is analysed in terms of the 'split inductance' matching network. Representing the laser structure and discharge by an electrical equivalent circuit, expressions are derived for the fractional power transfer to the discharge and the voltage gain provided by the matching circuit in terms of the generator frequency and discharge conditions. In addition, the design criteria are discussed for the selection of the coil inductances and laser head characteristics for optimum power transfer.