H2O enhanced focused ion beam micromachining

• 1 November 1995
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 13  (6) , 2565-2569
• https://doi.org/10.1116/1.588395

Abstract

Keywords

• FOCUSED ION BEAM