Diamond Synthesis Suppressing the Thermal Decomposition of Methane in a Hot-Filament CVD
- 1 September 1989
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 28 (9A) , L1631
- https://doi.org/10.1143/jjap.28.l1631
Abstract
Diamond films have been obtained by a new hot-filament CVD method in which CH4 is dccomposed mainly by abstraction reaction with atomic hydrogens. The film obtained by this method was compared with that obtained by the method that involves the thermal decomposition of CH4 near a filament. The quality of the former was better in crystallinity and amount of amorphous carbon but slightly lower in deposition rate than that by the latter method. It is suggested that the buoyancy flow induced near the hot filament affected the transport of reactant species even at 100 Torr.Keywords
This publication has 11 references indexed in Scilit:
- Synthesis of diamond films in a rf induction thermal plasmaApplied Physics Letters, 1987
- Effects of Oxygen on CVD Diamond SynthesisJapanese Journal of Applied Physics, 1987
- Growth of diamond thin films by dc plasma chemical vapor depositionApplied Physics Letters, 1987
- Synthesis of Diamond Thin Films by Thermal CVD Using Organic CompoundsJapanese Journal of Applied Physics, 1986
- Growth of diamond thin films by electron assisted chemical vapor depositionApplied Physics Letters, 1985
- Diamond synthesis from gas phase in microwave plasmaJournal of Crystal Growth, 1983
- Growth of diamond particles from methane-hydrogen gasJournal of Materials Science, 1982
- Vapor Deposition of Diamond Particles from MethaneJapanese Journal of Applied Physics, 1982
- The Thermal Decomposition of Methane. I. Kinetics of the Primary Decompositionto C2H6 + H2; Rate Constant for the Homogeneous Unimolecular Dissociation of Methane and its Pressure DependenceCanadian Journal of Chemistry, 1975
- Shock Tube studies on the Pyrolysis and Oxidation of MethaneThe Journal of Physical Chemistry, 1959