Aberration properties of focused ion-beam induced by space charge effect

• 1 November 1992
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 10  (6) , 2814-2818
• https://doi.org/10.1116/1.586008

Abstract

Keywords

• SPACE CHARGE
• ABERRATION PROPERTIES
• ION BEAM
• FOCUSED ION
• BEAM INDUCED
• CHARGE EFFECT
• PROPERTIES OF FOCUSED