Al planarization processes for multilayer metallization of quarter micrometer devices

• 1 December 1994
• journal article
• Published by Elsevier in Thin Solid Films
• Vol. 253  (1) , 367-371
• https://doi.org/10.1016/0040-6090(94)90349-2

Abstract

Keywords

• QUARTER MICROMETER
• MICROMETER DEVICES
• MULTILAYER METALLIZATION
• AL PLANARIZATION PROCESSES