Electron-beam exposure profiles in polymer films for metallic film mask fabrication
- 1 May 1978
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 15 (3) , 934-937
- https://doi.org/10.1116/1.569679
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: