Cathode Sputtering in the Abnormal Glow Discharge
- 1 July 1949
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 76 (1) , 153-154
- https://doi.org/10.1103/PhysRev.76.153
Abstract
DOI:https://doi.org/10.1103/PhysRev.76.153Keywords
This publication has 5 references indexed in Scilit:
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- The Preparation of Sputtered Metal FilmsReview of Scientific Instruments, 1934
- Excitation Processes in the Hollow Cathode DischargePhysical Review B, 1930
- Electrical Discharges in Gases. Part I. Survey of Fundamental ProcessesReviews of Modern Physics, 1930
- The luminous properties of electrically conducting helium gasBulletin of the Bureau of Standards, 1908