Nanostructuring high resolution phase zone plates in nickel and germanium using cross-linked polymers
- 1 January 1996
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 30 (1-4) , 513-516
- https://doi.org/10.1016/0167-9317(95)00298-7
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Electron beam generated phase zone plates with 30 nm zonewidth for high resolution X-ray microscopyJournal of Optics, 1992
- High resolution germanium zone plates and apertures for soft x-ray focalometryJournal of Vacuum Science & Technology B, 1990