Thick Film SiC Epitaxy for 'Filling Up' Micropipes

• 1 February 1998
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 264-268, 167-170
• https://doi.org/10.4028/www.scientific.net/msf.264-268.167

Abstract

Keywords

• MICROPIPE
• MICROPIPE FILLING
• THICK FILM EPITAXY