On the chemical vapour deposition of zirconia from ZrCl4H2CO2Ar gas mixtures: I. A thermodynamic approach
- 15 May 1986
- journal article
- Published by Elsevier in Journal of the Less Common Metals
- Vol. 119 (2) , 219-235
- https://doi.org/10.1016/0022-5088(86)90683-1
Abstract
No abstract availableKeywords
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