Resistivity Lowering Limitations of Heavily Doped Polycrystalline Silicon
Open Access
- 5 February 1979
- journal article
- Published by The Electrochemical Society of Japan in Denki Kagaku oyobi Kogyo Butsuri Kagaku
- Vol. 47 (2) , 118-123
- https://doi.org/10.5796/kogyobutsurikagaku.47.118